文部科学省科学研究費補助金「新学術領域研究」３次元半導体検出器で切り拓く新たな量子イメージングの展開

C02

C02:Detectors for ultra high speed nano-structure analysis using x-ray free electron laser (XFEL)

Dynamics in the femto- to mili-second time domain provide information on functional origin of advanced materials and bio-molecuels. Coherent X-ray Diffraction imaging (CDI) using X-ray Free-electron laser (XFEL) is one of the promising methods to obtain structure directly. Currently, the detector performance is one of the factors limiting the achievable performance. In this study, we develop XFEL detector based on silicon-on-insulator sensor technology. The target performance will be radiation hardness of effective 7 Grad (Si) at 7 keV X-ray, and high peak signal detection with single photon sensitivity. These will accelerate the XFEL science through the improvement of spatial resolution and and wide range of applicability of CDI method.

member

Takaki Hatsui RIKEN SPring-8 Center, XFEL Research and Development Division, Beam Line Research and Development Group, Data Acquisition Team, Team Leader
Sensor Process Development, Pixel Circuit Design,
http://xfel.riken.jp/eng/organization/xrdd_blrdg_dat.html

Yoichi Kirihara　　RIKEN SPring-8 Center, XFEL Research and Development Division, Beam Line Research and Development Group, Data Acquisition Team, Postdoctoral
Researcher Pixel Structure Design,
http://www.riken.jp/en/research/labs/rsc/xfel/beam_line/data/

Togo Kudo　　RIKEN SPring-8 Center, Control System and Information Technology Group, Researcher
Wide-band Data Acquisition System
http://xfel.riken.jp/eng/organization/ilsd_csitg.html

Toshinori Abe　　JASRI, Control and IT division Researcher
Wide-band Data Acquisition System
http://www.jasri.jp/en/

Takashi Kameshima JASRI XFEL Utilization Division Researcher
Development of XFEL Detector System
http://www.jasri.jp/en/

Publication

【Original Paper】

  •  “Development of Experimental Methodology for Highly Efficient Wafer-Level Evaluation of X-Ray Radiation Effects on Semiconductor Devices”,Togo Kudo, Kazuo Kobayashi, Shun Ono, Takeo Watanabe, Hiroo Kinoshita, Masao Okihara, and Takaki Hatsui,IEEE Trans. Nuclear Science,Vol.61,Issue 3,10.1109/TNS.2014.2321766.
  • “Development of an X-ray Pixel Detector with Multiport Charge-Coupled Device for X-ray Free-Electron Laser Experiments”,Takashi Kameshima, Shun Ono, Togo Kudo, Kyosuke Ozaki, Yoichi Kirihara, Kazuo Kobayashi, Yuichi Inubushi, Makina Yabashi, Toshio Horigome, Andrew Holland, Karen Holland, David Burt, Hajime Murao, and Takaki Hatsui*,Review of Scientific Instruments, 85, 033110 (2014).
  • “Multiple Application X-ray Imaging Chamber in Single-shot Diffractions with Femtosecond X-ray Laser Pulses”,Changyong Song*, Kensuke Tono, Jaehyun Park, Tomio Ebisu, Sunam Kim, Hiroki Shimada, Sangsoo Kim, Marcus Gallagher-Jones, Daewoong Nam, Takahiro Sato, Tadashi Togashi, Kanade Ogawa, Yasumasa Joti, Takashi Kameshima, Shun Ono, Takaki Hatsui, So Iwata, Makina Yabashi and Tetsuya Ishikawa,Journal of Applied Crystallography, 47 (2014) 188-197. 
  • "Sequential multiphoton multiple ionization of atomic argon and xenon irradiated by X-ray free-electron laser pulses from SACLA",K Motomura, H Fukuzawa, SK Son, S Mondal, T Tachibana, Y Ito, M Kimura, K Nagaya, T Sakai, K Matsunami, S Wada, H Hayashita, J Kajikawa, XJ Liu, R Feifel, P Johnsson, M Siano, E Kukk, B Rudek, B Erk, L Foucar, E Robert, C Miron, K Tono, Y Inubushi, T Hatsui, M Yabashi, M Yao, R Santra, K Ueda,Journal of Physics B-Atomic Molecular and Optical Physics, 46 (2013) Art.No. 164024. 
  • "Full-coherent free electron laser seeded by 13th-and 15th-order harmonics of near-infrared femtosecond laser pulses",T. Sato, A. Iwasaki, S. Owada, K. Yamanouchi, E.J. Takahashi, K. Midorikawa, M. Aoyama, K. Yamakawa, T. Togashi, K. Fukami, T. Hatsui, T. Hara, T. Kameshima, H. Kitamura, N. Kumagai, S. Matsubara, M. Nagasono, H. Ohashi, T. Ohshima, Y. Otake, T. Shintake, K. Tamasaku, H. Tanaka, T. Tanaka, K. Togawa, H. Tomizawa, T. Watanabe, M. Yabashi, T. Ishikawa,Journal of Physics B-Atomic Molecular and Optical Physics, 46 (2013) Art.No. 164006.
  • “High-speed classification of coherent X-ray diffraction patterns on the K computer for high-resolution single biomolecule imaging”,A. Tokuhisa, J. Arai, Y. Joti, Y. Ohno, T. Kameyama, K. Yamamoto, M. Hatanaka, B. Gerofi, A. Shimada, M. Kurokawa, F. Shoji, K. Okada, T. Sugimoto, M. Yamaga, R. Tanaka, M. Yokokawa, A. Hori, Y. Ishikawa*, T. Hatsui* and N. Go,Journal of Synchrotron Radiation 20 (2013) 899-904. 
  • C. Saji, T. Ohata, T. Kudo, T. Sugimoto, R. Tanaka, T. Hatsui, M. Yamaga,Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment, 731 (2013) 229-233.
  •  "Deep Inner-Shell Multiphoton Ionization by Intense X-Ray Free-Electron Laser Pulses",H. Fukuzawa, S.K. Son, K. Motomura, S. Mondal, K. Nagaya, S. Wada, X.J. Liu, R. Feifel, T. Tachibana, Y. Ito, M. Kimura, T. Sakai, K. Matsunami, H. Hayashita, J. Kajikawa, P. Johnsson, M. Siano, E. Kukk, B. Rudek, B. Erk, L. Foucar, E. Robert, C. Miron, K. Tono, Y. Inubushi, T. Hatsui, M. Yabashi, M. Yao, R. Santra, K. Ueda,Physical Review Letters, 110 (2013) Art.No. 173005.
  • "Double Core-Hole Creation by Sequential Attosecond Photoionization",K. Tamasaku, M. Nagasono, H. Iwayama, E. Shigemasa, Y. Inubushi, T. Tanaka, K. Tono, T. Togashi, T. Sato, T. Katayama, T. Kameshima, T. Hatsui, M. Yabashi, T. Ishikawa,Physical Review Letters, 111 (2013) Art.No. 043001.
  • “A direct-detection X-ray CMOS image sensor with 500 μm thick high resistivity silicon”,T. Hatsui, M. Omodani, T. Kudo, K. Kobayashi, T. Imamura，T. Ohmoto，A. Iwata, S. Ono，Y. Kirihara，T. Kameshima, H. Kasai, N. Miura, N. Kuriyama, M. Okihara, Y. Nagatomo, M. Nagasaki, T. Watanabe, Makina Yabashi,Proceedings of International Image Sensor Workshop, 2013.Online: http://www.imagesensors.org/Past%20Workshops/2013%20Workshop/2013%20Papers/03-5_058_hatsui_paper.pdf
  • “Theoretical study on valence excitations of multiply ionized states for envelope measurement of x-ray free-electron-laser pulses”,Yutaka Imamura and Takaki Hatsui,Physcal Review A, (2013) Art. No. 043413 (5 pages).
  • "Anomalous signal from S atoms in protein crystallographic data from an X-ray free-electron laser",T. R. M. Barends, L. Foucar, R. L. Shoeman, S. Bari, S. W. Epp, R. Hartmann, G. Hauser, M. Huth, C. Kieser, L. Lomb, K. Motomura, K. Nagaya, C. Schmidt, R. Strecker, D. Anielski, R. Boll, B. Erk, H. Fukuzawa, E. Hartmann, T. Hatsui, P. Holl, Y. Inubushi, T. Ishikawa, S. Kassemeyer, C. Kaiser, F. Koeck, N. Kunishima, M. Kurka, D. Rolles, B. Rudek, A. Rudenko, T. Sato, C.-D. Schroeter, H. Soltau, L. Strueder, T. Tanaka, T. Togashi, K. Tono, J. Ullrich, S. Yase, S. Wada, M. Yao, M. Yabashi, K. Ueda and I. Schlichting.,Acta Crystallographica Sec. D, 69 (2013) 838-842 Art. No. 131105.
  •  "Undulator commissioning by characterization of radiation in x-ray free electron lasers", T Tanaka, S Goto, T Hara, T Hatsui, H Ohashi, K Togawa, M Yabashi, H Tanaka, Physical Review Special Topics-Accelerators and Beams, 15 (2012) Art. No. 110701. 
  • "Effect of Ultrahigh-Density Ionization of Resist Films on Sensitivity Using Extreme-Ultraviolet Free-Electron Laser",  K Okamoto, T Kozawa, K Oikawa, T Hatsui, M Nagasono, T Kameshima, T Togashi, K Tono, M Yabashi, H Kimura, Y Senba, H Ohashi, R Fujiyoshi, T Sumiyoshi, Applied Physics Express, 5 (2012) Art. No. 096701. 
  • "Determination of the Pulse Duration of an X-Ray Free Electron Laser Using Highly Resolved Single-Shot Spectra",       Y Inubushi, K Tono, T Togashi, T Sato, T Hatsui, T Kameshima, K Togawa, T Hara, T Tanaka, H Tanaka, T Ishikawa, M Yabashi, Physical Review Letters, 109 (2012) Art. No. 144801. 
  • "A compact X-ray free-electron laser emitting in the sub-ångström region",Tetsuya Ishikawa, Hideki Aoyagi, Takao Asaka, Yoshihiro Asano, Noriyoshi Azumi, Teruhiko Bizen, Hiroyasu Ego, Kenji Fukami, Toru Fukui, Yukito Furukawa, Shunji Goto, Hirofumi Hanaki, Toru Hara, Teruaki Hasegawa, Takaki Hatsui, Atsushi Higashiya, Toko Hirono, Naoyasu Hosoda, Miho Ishii, Takahiro Inagaki, Yuichi Inubushi, Toshiro Itoga, Yasumasa Joti, Masahiro Kago, Takashi Kameshima, Hiroaki Kimura, Yoichi Kirihara, Akio Kiyomichi, Toshiaki Kobayashi, Chikara Kondo, Togo Kudo, Hirokazu Maesaka, Xavier M. Maréchal, Takemasa Masuda, Shinichi Matsubara, Takahiro Matsumoto, Tomohiro Matsushita, Sakuo Matsui, Mitsuru Nagasono, Nobuteru Nariyama, Haruhiko Ohashi, Toru Ohata, Takashi Ohshima, Shun Ono, Yuji Otake, Choji Saji, Tatsuyuki Sakurai, Takahiro Sato, Kei Sawada, Takamitsu Seike, Katsutoshi Shirasawa, Takashi Sugimoto, Shinsuke Suzuki, Sunao Takahashi, Hideki Takebe, Kunikazu Takeshita, Kenji Tamasaku, Hitoshi Tanaka, Ryotaro Tanaka, Takashi Tanaka, Tadashi Togashi, Kazuaki Togawa, Atsushi Tokuhisa, Hiromitsu Tomizawa, Kensuke Tono, Shukui Wu, Makina Yabashi, Mitsuhiro Yamaga, Akihiro Yamashita, Kenichi Yanagida, Chao Zhang, Tsumoru Shintake, Hideo Kitamura & Noritaka Kumagai,Nature Photonics, 6, (2012) 540–544.
  •  "Transmission-grating spectrometer for highly efficient and high-resolution soft X-ray emission studies",Hiroyuki Yamanea, Nobuhiro Kosugi, Takaki Hatsui,Journal of Electron Spectroscopy, 188 (2013) 155-160.
  •  "Interplay of strong chemical bonds and the repulsive Coulomb force in the metastable states of triply ionized homonuclear molecules: A theoretical study of N23+ and O23+",Y Imamura, T Hatsui,Physical Review A, 85 (2012) 012524.
  • "A photodiode amplifier system for pulse-by-pulse intensity measurement of an x-ray free electron laser",Kudo, T; Tono, K; Yabashi, M; Togashi, T; Sato, T; Inubushi, Y; Omodani, M; Kirihara, Y; Matsushita, T; Kobayashi, K; Yamaga, M; Uchiyama, S; Hatsui, TReview of Scientific Instruments, 83(4), Art. No. 043108 (2012) 
  • "Event-Synchronized Data-Acquisition System of 5 Giga bps Data rate for user experiment at the XFEL facility, SACLA"M. Yamaga, A. Amselem, T. Hirono, Y. Joti, A. Kiyomichi, T. Ohata, T. Sugimoto, R. Tanaka, T. Hatsui, Proceedings of ICALEPCS2011, Art. Number TUCAUST06 (2011).
  •  "Development of Image Data Acquisition System for 2D Detector at SACLA",Kiyomichi, A. Amselem, T. Hirono, T. Ohata, R. Tanaka, M.Yamaga, T. Hatsui,Proceedings of ICALEPCS2011, Art. Number WEPMN028 (2011).
  •  "Large-Bandwidth Data-Acquisition Network for XFEL facility, SACLA",T. Sugimoto, Y. Joti, T. Ohata, R. Tanaka, M. Yamaga, T. Hatsui,Proceedings of ICALEPCS2011, Art. Number WEBHAUST03 (2011).
  •  "Development of SOI pixel process technology",Y Arai, T Miyoshi, Y Unno, T Tsuboyama, S Terada, Y Ikegami, R Ichimiya, T Kohriki, K Tauchi, Y Ikemoto, Y Fujita, T Uchida, K Hara, H Miyake, M Kochiyama, T Sega, K Hanagaki, M Hirose, J Uchida, Y Onuki, Y Horii, H Yamamoto, T Tsuru, H Matsumoto, SG Ryu, R Takashima, A Takeda, H Ikeda, D Kobayashi, T Wada, H Nagata, T Hatsui, T Kudo, A Taketani, T Kameshima, T Hirono, M Yabashi, Y Furukawa, M Battaglia, P Denes, C Vu, D Contarato, P Giubilato, TS Kim, M Ohno, K Fukuda, I Kurachi, M Okihara, N Kuriyama, M Motoyoshi,Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment, 636 (2011) S31-S36. 
  • "Extreme ultraviolet free electron laser seeded with high-order harmonic of Ti:sapphire laser",T Togashi, EJ Takahashi, K Midorikawa, M Aoyama, K Yamakawa, T Sato, A Iwasaki, S Owada, T Okino, K Yamanouchi, F Kannari, A Yagishita, H Nakano, ME Couprie, K Fukami, T Hatsui, T Hara, T Kameshima, H Kitamura, N Kumagai, S Matsubara, M Nagasono, H Ohashi, T Ohshima, Y Otake, T Shintake, K Tamasaku, H Tanaka, T Tanaka, K Togawa, H Tomizawa, T Watanabe, M Yabashi, T Ishikawa,Optics Express, 19 (2011) 317-324. 
  • "Developments of SOI monolithic pixel detectors",Arai, Y; Miyoshi, T; Unno, Y; Tsuboyama, T; Terada, S; Ikegami, Y; Kohriki, T; Tauchi, K; Ikemoto, Y; Ichimiya, R; Ikeda, H; Hara, K; Miyake, H; Kochiyama, M; Sega, T; Hanagaki, K; Hirose, M (Hirose, M.)4; Hatsui, T; Kudo, T; Hirono, T; Yabashi, M; Furukawa, Y; Varner, G; Cooney, M; Hoedlmoser, H; Kennedy, J; Sahoo, H; Battaglia, M; Denes, P; Vu, C; Contarato, D; Giubilato, P; Glesener, L; Yarema, R; Lipton, R; Deptuch, G; Trimpl, M; Ohno, M; Fukuda, K; Komatsubara, H; Ida, J; Okihara, M; Hayashi, H; Kawai, Y; Ohtomo, A,Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment, 623 (2011) 186-188.

【Editors】

  • PIXEL 2012 Proceedings of the 6th International Workshop on Semiconductor Pixel Detectors for Particles and Imaging Inawashiro, Fukushima, Japan September 3–7, 2012,Yoshinobu Unno,Hidenori Toyokawa, Takaki Hatsui, Yasuo Arai,Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Volume 731, 11 December 2013.

【Patent】 

  • Horoki Kasai,　Yasuo Arai, Takaki Hatsui、Semiconductor Instrument, Patent　Application 2010-226717.
  • Semiconductor device has buried conductor that is provided in through hole in insulation layer

      Patent Number: US2012086079-A1; JP2012080045-A; CN102446938-A

      Inventors: KASAI H, ARAI Y, HATSUI T

【Invited talk】

  • T. Hatsui, “SOI Pixel Process: Lessons Learned from the Development of SOPHIAS, a Sensor for X-ray Free-Electron Laser Experiments”, Research Techniques Seminar, (Fermil National Accelerator laboratory, Batavia, Illinois, USA, August 1st, 2013)
  • T. Hatsui, “SOI Pixel Development at SPring-8”, Three-way meeting, (Argonne National Laboratory, Argonne, Illinois, USA, July 30th, 2013)
  • T. Hatsui, “SPring-8 Overview: From SACLA detector developments to SPring-8 Upgrades”, Three-way meeting, (Argonne National Laboratory, Argonne, Illinois, USA, July 30th, 2013).
  • T. Hatsui, “X-ray 2D detectors for SACLA: Current Status and Future Perspective”, The 12th Symposium on X-ray Imaging Optics (Osaka, Nov. 18th, 2013).
  • T. Hatsui, "Developments of X-ray 2D Detectors for SACLA", The 21th Anniversary International Workshop on Vertex Detectors (VERTEX 2012), (Jeju, Korea, 2012.9.21).
  • T. Hatsui, "Detector Developments for SACLA", International Workshop on Semiconductor Pixel Detectors for Particles and Imaging (PIXEL2012), (Inawashiro, Japan, 2012.9.4).
  • T.Hatsui, "SACLA Operation Status", 17th Sagamore Conference (Kitayuzawa, Japan, 2012.7.19)
  • T. Hatsui, "Silicon-On-Insulator PHoton Imaging Array Sensor (SOPHIAS) for X-ray Free-Electron Laser", SRI satellite workshop on X-ray Detectors for Synchrotron Applications, (Zurich, Switzerland, 2012, 7.6).
  • T. Hatsui, "Detector and Data Acquisition System for SACLA", Coherence 2012 Workshop, (Fukuoka, Japan, 2012.6.21).
  • T. Hatsui, "XFEL Detector Development at SACLA", The 8th International "Hiroshima" Symposium on the development and Application of Semiconductor Tracking Detectors (Taipei, Taiwan, 2011.12.8)
  • T. Hatsui, "RIKEN SOI detector for X-ray Free-Electron Laser Experiments", VIPS-Workshop on Vertically Integrated Pixel Sensors (Pavia, Italy, 2010.4.22)
  • T. Hatsui, T Horigome, Nobuhiro Kosugi "First High-Resolution Soft X-ray Emission Spectra Measured by Using a Newly Developed Transmission-Grating Spectrometer", The 15th International Conference on Vacuum Ultraviolet Radiation Physics, VUV XV (Berlin, Germany, 2007.7.30)
  • T. Hatsui, "Development and performance of a transmission-grating spectrometer for soft X-ray emission studies", International Workshop on Soft X-ray Raman Spectroscopy and Related Phenomena, IWSXR (Okazaki, Japan, 2006.8.18)
  • T. Hatsui, "Development and Performance of a Transmission-Grating Spectrometer for Soft X-ray Emission Studies", The 9th International Conference on Synchrotron Radiation Instrumentation, SRI2006 (Daegu, Exco, Korea, 2006.5.30)
  • T. Hatsui, "Design and development of a transmission-grating spectrometer for x-ray emission studies", 2nd Workshop on Advanced Spectroscopy of Organic Materials for Electronic Application (Hayama, Japan, 2003.10.23)
  • T. Hatsui, "Spin-forbidden shake-up states in the valence ionization of sulfur-containing molecules", International Workshop on Photoionization, IWP2002（SPring-8, 2002.8.24）

【Talk at the International conference etc.】

  • S. Ono, T. Kameshima, K. Ozaki, K. Kobayashi, T. Kudo, Y. Kirihara, T. Abe, M. Yamaga, T. Horigome, T. Hatsui, “Current status of a 4 Mpixel Multiport CCD Detector with 8 Arrayed sensors for X-ray Free-Electron Laser Facility SACLA”, IEEE Nuclear Science Symposium (Seoul, Korea, Oct., 30th, 2013).
  • T. Hatsui, S. Ono, M. Omodani, T. Kudo, K. Kobayashi, Y. Kirihara,” Line-Spread Function and Noise Spectrum Analysis of a Direct-Detection X-ray CMOS Image Sensor with 500 μm Thick High Resistivity Silicon”, (IEEE Medical Imaging Conference, Seoul, Korea, Nov. 1st, 2013)
  • S. Honda, K. Hara, Y. Arai, T. Miyoshi, M. Ohno, T. Hatsui, T. Tsuru, N. Miura, H. Kasai, M. Okihara, M. Asano, T. Maeda, N. Tobita, “Total Ionization Damage Effects in Double Silicon-on-Insulator Devices”, (IEEE Nuclear Science Symposium, Seoul, Korea, Oct. 31st, 2013).
  • S. Ono, T. Hatsui, M. Omodani, K. Kobayashi, T. Kudo, T. Imamura, T. Ohmoto, A. Iwata, “Noise Analysis of a Silicon-on-Insulator (SOI) Pixel Sensor with 500 μm Thick High Resistivity Silicon for X-Ray Free-Electron Laser Experiments”, (IEEE Nuclear Science Symposium, Seoul, Korea, Oct. 29th, 2013).
  • T.Kameshima, "Upgrade overview of multi-port CCD detector system",The 6th International Workshop on FEL Science (Tainan, Taiwan, 6th, Nov. 2013)